Sensor integration

Objective

• Integrate chemical, biological, and physical sensors with electronic, photonic, and fluidic circuits:

› Develop a universal platform for integrated sensors.

› Demonstrate integrated chemical, biological, and physical sensors that are self- or remote powered, and can communicate to the base station via wired and/or wireless channels.

 

Fig. 1 Microfluidic channels integrated with optical waveguides.	Fig. 2 Fluorescence of the analyte under guided laser excitation.

Results

•Development of cross-platform photonic and fluidic circuit technologies that can be integrated with various types of sensors.

•Fabrication of microfluidic and optical circuits integrated with porous Si and porous alumina multi-channel sensor array.

•Fabrication of highly versatile adaptive optical front-end for image and optical sensors.